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发明名称
ACCELEROMETER
摘要
申请公布号
JPH0772167(A)
申请公布日期
1995.03.17
申请号
JP19930221181
申请日期
1993.09.06
申请人
FUJITSU LTD
发明人
IMAMURA TAKAHIRO;MIZOSHITA YOSHIBUMI;ARIGA TAKAHARU
分类号
G01P15/02;G01P15/08;G01P15/09;H01L29/84;H01L41/09;(IPC1-7):G01P15/02
主分类号
G01P15/02
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代理人
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