| 摘要 |
PURPOSE: To improve throughput of a system under a micro circumstance, by simplifying the operation of a load.unload mechanism. CONSTITUTION: A load lock accepts an SMIF type box containing stack of semiconductor wafers in a load lock chamber 25, in such a manner that the SMIF type box is made an extension part of the load lock chamber 25, and has a seal structure so as to obtain a coupling structure capable of tight seal. Opening and closing of the SMIF type box is selectively enabled. A board which selectively leads out a wafer cassette from the box via a port communicating with the load lock chamber 25, and selectively leads in the wafer cassette in the load lock is prepared. The board 28 tightly closes the port when the board 28 does not exist in the SMIF type box. A single robot moves one sheet of wafer at a time between the wafer cassette and a treatment chamber.
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