| 摘要 |
PURPOSE:To automatically analyze the causes of failures of an LSI quickly by electrical means based on an expert system, which also helps to improve the device yield. CONSTITUTION:In a personal computer wherein expert knowhow including a memory task, a process engineer, a circuit engineer and a layout engineer is input, the personal computer receiving a test result from the memory task refers to the expert knowhow, instructs a next test to a memory tester, so automatically finds out causes of an LSI defect as if the test was performed through a design engineer and the memory tester. At first, bit map information from the tester is classified with a main expert, a subexpert in response to its result starts and the cause of the defect is automatically found out in a short time. These results are processed statistically, a main cause in which a rate of finished products without imperfection is determined is analyzed and improvement of the rate is contributed. |
