| 摘要 |
<p>PURPOSE:To remove an electric charge from the back of an object to be treated by installing a switch means for grounding a push-up pin and a lower-part electrode before the object is pushed up after the object has been treated. CONSTITUTION:After a plasma treatment has been finished, a switch 50 for a power supply is turned off, the application of a high-frequency voltage to a lower-part electrode 28 is stopped, and the generation of a plasma is stopped. A switch means 54 for grounding is turned on, and the lower-part electrode 28 and push-up pins 58 are grounded via power-supply line 48 and a power- supply plate 46. An air cylinder 14 for up-and-down drive is driven, the individual push-up pins 58 are raised, four corners on the back of an LCD substrate S are brought into contact with tip parts of pin bodies 60, and the LCD substrate S is pushed up as a whole. At this time, when the LCD substrate S is separated from the lower-part electrode 28, an electric charge is generated in the LCD substrate S due to an exfoliation electrification phenomenon. However, the generated electric charge immediately escapes via the push-up pins 58 which are grounded, and it is possible to restrain the LCD substrate S from being electrified.</p> |
