发明名称 VACUUM CONTAINER
摘要 PURPOSE:To reduce the amount of out gas from the barrier of a container and the amount of gas passing through a barrier by forming SiO2 film on the vacuum barrier surface of the container. CONSTITUTION:Gases such as H2, CO2, and H2O are discharged from the inside at an area which is exposed to vacuum in a fiber-reinforced plastic without any covering. Also, in the fiber-reinforced plastic for isolating atmospheric and vacuum, the pressure difference between both surfaces is constantly one atmospheric pressure. The pressure difference causes gas to be transmitted through the inside of the fiber-reinforced plastic. These gases cause the vacuum of a vacuum bath to deteriorate. SiO2 film is formed on the barrier surface of a blocking agent container 6 or an outside container 8. The covering film on the fiber-reinforced plastic surface reduces out gas from FRP surface and reduces the amount of gas transmitted through the fiber-reinforced plastic.
申请公布号 JPH0774399(A) 申请公布日期 1995.03.17
申请号 JP19930219510 申请日期 1993.09.03
申请人 HITACHI LTD 发明人 NEMOTO TAKEO;ISOKAMI HISASHI;SAEKI MITSURU
分类号 F25D3/10;H01F6/04;H01L39/04;(IPC1-7):H01L39/04 主分类号 F25D3/10
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