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发明名称
QUARTZ GLASS CORE TUBE
摘要
申请公布号
JPH0774122(A)
申请公布日期
1995.03.17
申请号
JP19940057825
申请日期
1994.03.28
申请人
SHINETSU QUARTZ PROD CO LTD
发明人
INAGI KYOICHI;KIMURA HIROSHI;NAKAMURA KAZUO;KENMOCHI KATSUHIKO
分类号
C30B33/02;H01L21/22;H01L21/324;(IPC1-7):H01L21/22
主分类号
C30B33/02
代理机构
代理人
主权项
地址
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