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发明名称
ELLIPSOMETER
摘要
申请公布号
JPH0772013(A)
申请公布日期
1995.03.17
申请号
JP19930217397
申请日期
1993.09.01
申请人
PHOTO DEVICE KK
发明人
HIGASHIYA MITSURU;SEKINE KUNIO;KOGA MASAO;TOMITA KAZUTOMI
分类号
G01J4/00;(IPC1-7):G01J4/00
主分类号
G01J4/00
代理机构
代理人
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地址
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