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发明名称
SURFACE INSPECTING APPARATUS
摘要
申请公布号
JPH0772088(A)
申请公布日期
1995.03.17
申请号
JP19930240578
申请日期
1993.08.31
申请人
JIENESHISU:KK
发明人
ONO TSUKANE;SUZUKI TAKAYOSHI
分类号
G01B11/30;G01N21/88;G01N21/952;(IPC1-7):G01N21/88
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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