发明名称 METHOD FOR DETERMINING EXCESS CARRIER LIFETIME IN SEMICONDUCTOR DEVICES
摘要 Described is a method for excess carrier lifetime testing of semiconductor materials by the use of ultrasonically soldered contacts in obtaining open-circuit voltage decay measurements. The method is particularly adapted for use in in-line production testing of semiconductor wafers and does not require the use of high temperatures to bond contacts to the wafer being tested.
申请公布号 US3697873(A) 申请公布日期 1972.10.10
申请号 USD3697873 申请日期 1969.05.28
申请人 WESTINGHOUSE ELECTRIC CORP. 发明人 ROBERT G. MAZUR
分类号 G01R31/26;(IPC1-7):G01R31/22;B23K21/00 主分类号 G01R31/26
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