APPARATUS FOR GENERATING AND RECOVERING VAPOR,申请号JP19930217516-传众专利搜索

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发明名称	APPARATUS FOR GENERATING AND RECOVERING VAPOR
摘要
申请公布号	JPH0774111(A)	申请公布日期	1995.03.17
申请号	JP19930217516	申请日期	1993.09.01
申请人	TOSHIBA CORP	发明人	HASHIDATE YOSHIO
分类号	C23C14/24;H01L21/205;H01L21/285;(IPC1-7):H01L21/205	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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