发明名称 MAGNETIC-FORCE MICROSCOPE
摘要 PURPOSE:To enhance the magnetic sensitivity of a magnetic-force microscope by a method wherein an irregularity in the magnetic sensitivity is corrected by using a coil for magnetic-field generation, the absolute value of a magnetic field on the surface of a sample can be measured and, in addition, a ferromagnetic probe is magnetized. CONSTITUTION:A piezoelectric element 2 is vibrated, a plate spring 1 which is provided with a ferromagnetic probe is resonated, and vibrations of the plate spring 1 are detected by a laser beam 4. An electric current is made to flow to a coil 7 for magnetic-field generation, and a magnetic field is generated. The magnetic field can be corrected on the basis of the relationship between the electric current and the amplitude of the vibrations. In addition, the probe can be magnetized, and the magnetic sensitivity of the title microscope can be enhanced.
申请公布号 JPH0772229(A) 申请公布日期 1995.03.17
申请号 JP19930218776 申请日期 1993.09.02
申请人 SEIKO INSTR INC 发明人 TOMITA EISUKE;YASUTAKE MASATOSHI
分类号 G01N27/00;G01Q30/00;G01Q60/50;G01R33/02;G01R33/038;G01R33/10;G01R33/12;(IPC1-7):G01R33/12 主分类号 G01N27/00
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