| 摘要 |
<p>PURPOSE:To prevent the adhesion of foreign matter to a pellicle film adhered to a pellicle frame by treating this pellicle frame in such a manner that the entire surface thereof is smoothed, thereby preventing the generation of dust from the surface of the pellicle frame. CONSTITUTION:This pellicle is produced by adhering the pellicle film to the pellicle frame which is so treated that the entire surface thereof is smoothed to prevent the generation of dust from the surface of the pellicle frame. While the smoothing treatment in such a case may be executed by any method, a plating treatment of the pellicle frame with a metal having the higher corrosion resistance than the corrosion resistance of aluminum is recommended from an industrial view point. This plating treatment is executed with the metal having the higher corrosion resistance than the corrosion resistance of aluminum and, therefore, gold plating, silver plating or chemical conversion treatment, such as chromate treatment, which is other plating technique, may be adopted. Nickel plating and chrome plating are more recommended from an economical view point. The surface of the pellicle frame is easily cleaned by ultrasonic washing.</p> |
