摘要 |
Additive elements are added to Fe-N soft magnetic thin films along with oxygen, so that the thermal stability is remarkably improved. After annealing treatment at approximately 550 DEG C, it is possible to provide an Fe-N soft magnetic thin film with a low coercive force. Similarly, it is also possible to provide a soft magnetic thin film having a low coercive force by introducing a combination of specific types of additive elements to Fe-N soft magnetic thin films. When oxygen is further added to the film, it is also possible to provide a soft magnetic thin film which has very excellent soft magnetic characteristics and good thermal stability. The soft magnetic thin films of the invention have good soft magnetic characteristics, a high saturation magnetic flux density and good thermal stability. A magnetic head of a metal-in-gap type using the soft magnetic thin film is also described. <IMAGE> |
申请人 |
SONY CORP., TOKIO/TOKYO, JP |
发明人 |
KATORI, KENJI, SHINAGAWA-KU, TOKYO, JP;HAYAKAWA, MASATOSHI, SHINAGAWA-KU, TOKYO, JP;ASO, KOICHI, SHINAGAWA-KU, TOKYO, JP;HAYASHI, KAZUHIKO, SHINAGAWA-KU, TOKYO, JP;KAJIWARA, KAZUO, SHINAGAWA-KU, TOKYO, JP |