A method for producing a precise semiconductor alloy composition from input variables under nonlinear incorporation conditions.

摘要

A process for manufacturing precise alloy compositions in nonlinear alloy systems. The invention implements a new quadratic fitting function that relates alloy composition cA for a variable A to input fluxes fA and fB, as cA=fA<2>/(fA<2>+ beta fB<2>). beta is a parameter that is used to modify the incorporation of the Group V input variable B. This modification is necessary because of different surface populations of Group V dimer species. This new fitting function precisely predicts alloy compositions in nonlinear systems, such as the GaAs1-yPy, system, where y is set equal to the composition cA.