Storage capacitor with a conduction oxide electrode for metal oxide dielectrics.

摘要

A capacitor having a high dielectric constant and method of making the same is disclosed. The capacitor (10) comprises a bottom electrode (12) comprising a conductive oxide layer deposited upon a substrate (110) by chemical vapor deposition. A dielectric layer (14) having a high dielectric constant is deposited upon the conductive oxide. Lastly, a counter electrode (16) is formed upon the dielectric layer. The dielectric material is selected in the group consisting of:
tantalum oxide (Ta₂O₂), strontium titanium oxide (SrTiO₃), and barium titanium oxide (BaTiO₃).