发明名称 Monolithically integrated device and process for making the same.
摘要 A monolithically integrated device (component) and a process for producing the same are described. The device has a P<+> structure which is embedded in a semiconductor layer and is partially overlapped by an N<+> structure and coated with an oxide layer. Long-term stabilisation of the breakdown voltage is guaranteed in the case of zener diodes with breakdown at the surface. It is provided for this purpose that the oxide layer (20) is stripped in a region (35) and that there is arranged there an oxide layer (36) which has windows (22, 24) which define the region of the P<+> structure (14) and the region of the N<+> structure (16). A polysilicon web (30) is arranged in the overlap region (32) above the PN junction (18). <IMAGE>
申请公布号 EP0612109(A3) 申请公布日期 1995.03.15
申请号 EP19940101103 申请日期 1994.01.26
申请人 BOSCH GMBH ROBERT 发明人 MAROLT VINKO
分类号 H01L29/06;H01L29/40;H01L29/78;H01L29/866 主分类号 H01L29/06
代理机构 代理人
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