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发明名称
Cathodic sputtering device.
摘要
申请公布号
EP0463227(B1)
申请公布日期
1995.03.15
申请号
EP19900122149
申请日期
1990.11.20
申请人
LEYBOLD AKTIENGESELLSCHAFT
发明人
ZEJDA, JAROSLAV
分类号
C23C14/34;H01J37/34;(IPC1-7):C23C14/34;H01J37/32
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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