An apparatus for cleaning, rinsing and drying workpieces.

摘要

The apparatus comprises: a reservoir (13) containing a vaporizable cleaning fluid, a processing vessel (2) having a sealed cover (3), a distillation column (20) for distillation of the cleaning fluid under a vacuum; a vacuum generating means (9) for providing a vacuum in the vessel (2) and the column (20), and connection means (40) for connecting the column (20) and the vessel (2). Application to apparatus operating in sequential cycles: cleaning, rinsing and drying without pollution e.g. escape of vapors in the environment. When low pressure has been attained into vessel (2), communication between vessel and column (20) is established via valves (41,32) and rapid transfer of vapor between (20) and (2) takes place, enhancing rinsing and drying of the parts. Opening the vent (42), atmospheric pressure is reestablished and vapors are transferred via vacuum pump (10) and conduit (12) to reservoir for recirculation. <IMAGE>