发明名称 |
SEMICONDUCTOR MANUFACTURING APPARATUS USING HOLDING APPARATUS |
摘要 |
A device for holding an object by electrostatic force includes a body made of a dielectric of a low resistivity, such as SiC, and an electrode provided on that surface of the device body facing away from a holder surface, so that a potential difference is produced between the object and the holder surface. A change-over switch for grounding the device body to an earth potential of an ambient environment is provided, so that the dielectric can be rapidly brought into a potential equal to the earth potential. |
申请公布号 |
KR950002187(B1) |
申请公布日期 |
1995.03.14 |
申请号 |
KR19910018970 |
申请日期 |
1991.10.28 |
申请人 |
HITACHI LTD. |
发明人 |
DOKISUE, HIROMITSU;KITSUNAI, HIROYUKI;TSUMAKI, NOBUO;INOUE, HIROSHI |
分类号 |
B05B13/02;B23Q3/15;H01L21/683;H01L21/687;H02N13/00;(IPC1-7):H01L21/68 |
主分类号 |
B05B13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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