METHOD FOR PRODUCING A PRECISE ALLOY COMPOSITION FROM INPUT VARIABLES UNDER NONLINEAR INCORPORATION CONDITIONS

摘要

A Method for Producing a Precise Alloy Composition From Input Variables Under Nonlinear Incorporation Conditions : A process for manufacturing precise alloy compositions in nonlinear alloy systems. The invention implements a new quadratic fitting function that relates alloy composition CA for a variable A to input fluxes fA and fB, as cA=fA2/(fA2+.beta.fB2). .beta. is a parameter that is used to modify the incorporation of the Group V input variable B. This modification is necessary because of different surface populations of Group V dimer species. This new fitting function precisely predicts alloy compositions in nonlinear systems, such as the GaAs1-yPy system, where y is set equal to the composition cA.