| 摘要 |
PURPOSE:To provide a carbon substrate production process capable of preventing the warpage of the substrate, enabling the use of the product as a carbon substrate for high-density magnetic recording disk and effective for preventing the generation of substrate defect. CONSTITUTION:An end plate 4 made of carbon is placed in a hole 2 of a graphite jig 1. A plurality of baked and carbonized formed resin parts 3 are stacked on the end plate and topped with an end plate 5 made of carbon. A weight 6 made of tantalum carbide and sealed in a graphite vessel 7 is placed on the top end plate. The resin parts are subjected to a hot hydrostatic pressing. The end plates 4, 5 have a thermal conductivity of <=20kcal/m.Hr. deg.C. The graphite jig 1 and the carbon end plates 4,5 contacting with the formed resin parts 3 have an ash content of 5100ppm, Fe content of <=10ppm, Ti content of 55ppm and V content of <=5ppm. |
