发明名称 Input/output (I/O) thin film repair process
摘要 Missing thin film metallurgy on substrates is replaced during the manufacture of thin film electronic circuits. The process allows the missing thin film metallurgy, such as an input/output (I/O) pad or pads, to be replaced quickly and simply, without damaging the other I/O pads or thin film metallurgy already applied to the substrate. The process essentially uses lift-off technology without building a complete lift-off stencil.
申请公布号 US5397607(A) 申请公布日期 1995.03.14
申请号 US19940243898 申请日期 1994.05.17
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 SHIELDS, RONALD R.;SMITH, KURT A.;MCDONALD, RONALD J.
分类号 G03F1/00;H01L21/768;H05K3/00;H05K3/06;H05K3/14;H05K3/22;(IPC1-7):B05D1/36 主分类号 G03F1/00
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