发明名称 CAPACITOR AND SEMICONDUCTOR DEVICE HAVING IT
摘要 PURPOSE:To obtain an element having small electrode areas, an excellent insulating property, and a small electrostatic capacity change with temperature by adjusting the diameter of the average crystal grain of the polycrystalline substances of a compound. CONSTITUTION:Like usual synthesis of ceramics, raw materials such as carbonate, oxide, etc., are mixed, press-formed, and calcined after that. The calcined ferroelectric compound is ground by a ball mill, and impalpable powder of an average grain diameter of 150nm or less is synthesized. This impalpable powder is mixed by a binder, and burned at a low temperature to obtain a ceramic. Electrodes 2a and 2b and leads 3a and 3b are fitted to this ceramic 1 by evaporation, adhesion, baking, etc., respectively, and an insulating coat layer 4 is formed to obtain a capacitor. Incidentally, it is desirable that a ferroelectric material should be a material in which parts of Ba and/or Ti of Babies are replaced with other metal ions.
申请公布号 JPH0766071(A) 申请公布日期 1995.03.10
申请号 JP19930212779 申请日期 1993.08.27
申请人 MITSUBISHI ELECTRIC CORP 发明人 MIKAMI NOBORU;HORIKAWA TAKESHI;MAKITA TETSUO;SATO KAZUNAO
分类号 H01G4/12;H01L21/8242;H01L21/8246;H01L27/10;H01L27/105;H01L27/108 主分类号 H01G4/12
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