METHOD FOR CLEANING SQUARE SUBSTRATE AFTER RUBBING TREATMENT AND DEVICE THEREFOR

摘要

PURPOSE:To prevent the generation of cleaning irregularity on the surface of a substrate, especially a large square substrate by bringing respective side-plates into contact with respective side surfaces facing each other of the square substrate before cleaning and moving the square substrate relatively to a flowing down position while making pure water flow down in a curtain shape on the surface of the square substrate over whole width direction thereof. CONSTITUTION:Pure water is supplied to a high pressure spray pipe 20 from a pure water tank 24 by driving a high pressure pump 26 and pure water is jetted on the surface of the square substrate W from nozzles of the high pressure spray pipe 20. The plural nozzles of the high pressure spray pipe 20 are provided in parallel in the direction orthogonal to a transportation direction of the square substrate W and the pure water 28 is allowed to flow down on the surface of the square substrate W in a curtain shape with a high pressure. In a pre-stage treatment room 10, sideplates 30 with slender plate shape which are brought into contact with a pair of side surfaces facing each other of the square substrate W to be transported by a transportation roller 18 are disposed on both sides and respective upper edges thereof are held at positions by several mm higher than upper surface of the square substrate W.