发明名称 METHOD OF FORMING BUMP
摘要 PURPOSE:To provide a method of forming bumps, in which a screen is easily released. CONSTITUTION:Bumps 51 of conductive bonding agent 5, which increases its bonding power by heat, are attached to the upper surface of a substantially flat plate 1 coated with adhesive 2. A semiconductor chip 10, heated, is placed and pressed against the bumps so that they can be bonded. Then, the adhesive 2 is removed by organic solvent, for example, isopropyl alcohol, before the plate 1 is separated from the bumps. The adhesive 2 may also be of the type that increases its adhesiveness by heat.
申请公布号 JPH0766210(A) 申请公布日期 1995.03.10
申请号 JP19930232411 申请日期 1993.08.24
申请人 SONY CORP 发明人 YOSHIKAWA TAKASHI
分类号 H01L21/60;H01L21/321;(IPC1-7):H01L21/321 主分类号 H01L21/60
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