FLUORESCENT X-RAY INSPECTION DEVICE

摘要

PURPOSE: To use an X-ray tube as an X-ray generating source by providing a filter assembly capable of moving between a plurality of positions to control the energe zone of the X-ray. CONSTITUTION: An X-ray is radiated from a window 2 of an X-ray tube 1 including rhodium target to pass through a slide filter assembly 3. Next, the X-ray passes through an opening part 4 to collide with a sample 5 in a sample holder 33. Next, the fluorescence X-ray radiated from the sample 5 passes through a tubular filter assembly 6 to pass through a window 7 of a proportional counter 8 filled with gas. The proportional counter 8 is connected to a process means for calculating and indicating the total count. The filter assembly 3 can control the energy zone of X-ray reaching the sample 5 by two different methods and move between a plurality of positions. Also, the filter assembly 6 can control the energy zone of the fluorescence X-ray from the sample 5 by two different methods and move between a plurality of positions.