SHEET ION BEAM DEVICE,申请号JP19930235434-传众专利搜索

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发明名称	SHEET ION BEAM DEVICE
摘要
申请公布号	JPH0765764(A)	申请公布日期	1995.03.10
申请号	JP19930235434	申请日期	1993.08.28
申请人	ULVAC JAPAN LTD	发明人	FUKUI RYOTA;TSUGUEDA TAKAYUKI
分类号	H01J27/08;H01J37/08;(IPC1-7):H01J37/08	主分类号	H01J27/08
代理机构		代理人
主权项
地址

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