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发明名称
VACUUM PROCESSING SYSTEM
摘要
申请公布号
JPH0766183(A)
申请公布日期
1995.03.10
申请号
JP19930215395
申请日期
1993.08.31
申请人
TOSHIBA CORP
发明人
GOTO FUTOSHI
分类号
H01L21/203;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/203
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代理人
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