| 摘要 |
PURPOSE:To obtain the stable output even in highly repetitive operation by connecting the vicinity of a reserve ionization generating part on the upstream side and the downstream side of a main discharge space formed between a pair of main discharge electrodes with an auxiliary gas flow path. CONSTITUTION:When a voltage is applied into a discharge part 7 from a pulse power supply 8, spark discharge occurs at reserve-ionization ultraviolet-ray generating parts 5 formed between pins 6 for generating reserve ionization ultraviolet rays, and ultraviolet ray irradiation takes place. At this time, the decomposed product of the laser gas locally generated at the reserve-ionization ultraviolet-ray generating part 5 at the upstream side is made to pass a gas bypass 11 and guided to the downstream side of a main discharge space 3. Therefore, the direct inflow of the decomposed product into the main discharge space can be prevented. Furthermore, since the gas bypass flow path 11 is constituted of glass or the like, which transmits the ultraviolet rays, the provision of the gas bypass flow path 11 does not affect on the ultraviolet ray irradiation. Therefore, the stable glow discharge can be obtained. |
