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发明名称
MANUFACTURE OF SOIL SUBSTRATE
摘要
申请公布号
JPH0766285(A)
申请公布日期
1995.03.10
申请号
JP19930232408
申请日期
1993.08.24
申请人
SONY CORP
发明人
SHIMANOE MUNEHARU
分类号
H01L21/304;H01L21/02;H01L21/76;H01L21/762;H01L27/12;(IPC1-7):H01L21/762
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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