摘要 |
The device has a noise attenuation filter, which makes the filter flexible to the charges of the semiconductor manufacturing process. The device includes a 1st voltage-current converter (17) which connects to the auxilliary, signal path the 1st, and 2nd amplifiers, an input and output matching circuit of signal path to the input terminal, a variable current amplifying unit, a high pass filter (HPF:13) which varies the cutoff frequency, a 2nd voltage-current converter, an amplifying means, an operational amplifier (10), and a limiter.
|