发明名称 Gas discharge laser
摘要 In the case of a gas discharge laser with a radio-frequency voltage source (4), a matching network (2) and a line (coaxial cable) (3) with impedance matching for the ignition case, the unignited case is optimised for ignition in that, by selection of the length (1) of the line (3), a particular active impedance (Z1) is produced, which, together with the other components (2, 12), brings about voltage resonance at the electrodes (12) at the operating frequency ( omega 0). <IMAGE>
申请公布号 DE4329550(A1) 申请公布日期 1995.03.09
申请号 DE19934329550 申请日期 1993.09.02
申请人 FA. CARL ZEISS, 89520 HEIDENHEIM, DE 发明人 SAUER, RALF-ROLAND, 73460 HUETTLINGEN, DE;ALEXANDER, HINZ, DR., 89551 KOENIGSBRONN, DE
分类号 H01S3/03;H01S3/0975;H01S3/223;(IPC1-7):H01S3/097 主分类号 H01S3/03
代理机构 代理人
主权项
地址