| 摘要 |
PURPOSE:To inspect a 2nd material present on a 1st material with high accuracy by finding sets of coordinates where foreign matter is present in the atmosphere and under a vacuum and discriminating between original foreign matter and foreign matter which stick by vacuum evacuation from the sum of and difference between the sets. CONSTITUTION:The 1st material serving as a body 1 to be measured is sent onto a stage 2 by opening a gate valve 15 of a measurement chamber. In this state, a laser light emission device 17, a galvanomirror 174, a mirror 170, a photodetector 179, etc., are put in operation to be analyzed A and a set of coordinates where the foreign matter is present is stored as data in a control system 133. Then the valve 15 of a sample insertion part is closed and a valve 15 linked with an evacuation system is opened to be analyzed B by performing said operation again while evacuating the measurement chamber. Then data of the analyses A and B are compared to calculate the difference, so the foreign matter is detected by the analysis A, but disappears in the analysis B. Then the sum of the data of the analyses A and B is calculated, optional foreign matter having common coordinates between both of them is irradiated with laser light by the laser light emission device 19, elements 196 are collected and detected by an on analysis part 199, thereby making the constituent elements of the foreign matter clear. |
