| 摘要 |
PURPOSE:To simplify a patterning process for the series connection construction of a thin film solar battery by a method wherein the thin film solar battery is divided into a plurality of unit cells. CONSTITUTION:If a laser beam is applied to amorphous semiconductor layers 31, 32 and 33 to crystallize them, bonding strengths between the respective layers 31, 32 and 33 and corresponding electrode layers 21, 22 and 23 under them are reduced, so that the layers 31, 32 and 33 can be removed easily together with electrode layers formed on them. The crystallization can be performed simultaneously with the patterning of the amorphous semiconductor layers and the patterning process of the upper electrode layers 41, 42 and 43 can be eliminated. Thus, the manufacturing process of a thin film solar battery can be simplified. |
