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发明名称
MULTILAYER INTERCONNECTION STRUCTURE FOR SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH0758111(A)
申请公布日期
1995.03.03
申请号
JP19930222053
申请日期
1993.08.12
申请人
SONY CORP
发明人
KANEMURA RYUICHI
分类号
H01L21/203;H01L21/318;H01L21/3205;H01L21/768;H01L23/52;H01L23/522;(IPC1-7):H01L21/320
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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