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发明名称
USING METHOD OF SEMICONDUCTOR WAFER AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0757980(A)
申请公布日期
1995.03.03
申请号
JP19930223774
申请日期
1993.08.17
申请人
NIPPON STEEL CORP
发明人
OTSUBO TAKAYUKI
分类号
G03F7/20;H01L21/02;(IPC1-7):H01L21/02
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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