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发明名称
MANUFACTURE FOR FERROELECTRIC THIN FILM
摘要
申请公布号
JPH0757535(A)
申请公布日期
1995.03.03
申请号
JP19930215088
申请日期
1993.08.06
申请人
TDK CORP
发明人
SHIRAKAWA YUKIHIKO
分类号
C30B1/04;C30B23/08;C30B29/32;H01B3/00;H01B19/00;(IPC1-7):H01B3/00
主分类号
C30B1/04
代理机构
代理人
主权项
地址
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