发明名称 METHOD AND APPARATUS FOR DETECTING OBJECT TO BE PROCESSED
摘要 <p>PURPOSE:To detect an object accurately and set a detectability width of the object automatically. CONSTITUTION:A detection sensor 3 for detecting an object 2 in a object carrier 1 is moved step by step from the lower to the upper or from the upper to the lower at an edge part of the object 2. When the sensor 3 detects the edge of the object 2, the position is stored in a first memory unit 5. When the edge part is hot measured by the detection sensor 3, the position is stored in a second memory means 6. Consequently, the detectable width of the object 2 is calculated from these position stored in the first and second memory units 5 and 6.</p>
申请公布号 JPH0758187(A) 申请公布日期 1995.03.03
申请号 JP19930197399 申请日期 1993.08.09
申请人 KOKUSAI ELECTRIC CO LTD 发明人 NAKAGAWA HITOSHI;YASHIMA SHINJI;OSHIMA MITSUHIRO
分类号 G01B11/00;G01B11/02;G05D3/12;H01L21/67;H01L21/68;(IPC1-7):H01L21/68 主分类号 G01B11/00
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