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发明名称
IC TESTING DEVICE
摘要
申请公布号
JPH0755879(A)
申请公布日期
1995.03.03
申请号
JP19930204370
申请日期
1993.08.19
申请人
FUJITSU LTD
发明人
FURUHASHI FUMIYOSHI;AKIYAMA HIDEKI
分类号
G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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