| 摘要 |
PURPOSE:To provide a process for inexpensively producing a light shielding layer which is free from pinholes and has a high light shielding effect by subjecting a conductive to an electrolytic treatment after formation thereof, then subjecting a substrate to a surface treatment with an acid, chelating agent or their combination. CONSTITUTION:The conductive film 2 consisting of an oxide is formed on the substrate 1 having a smooth surface. The substrate formed with the conductive film 2 is then put as cathode into an electrolyte and is subjected to the electrolytic treatment. A photosensitive resin 3 is electrodeposited on the conductive film if this resin is utilized as the electrolyte. The points to be formed with the light shielding layer are exposed by executing mask exposing and developing patterning. A part 4 of the components of the conductive film surface are precipitated on the surface. These parts are treated and removed by the acid or the chelating agent. The surface is thereby further reformed and the wettability is greatly improved. A plating layer 5 is then formed by executing plating and the photosensitive resin remaining in the final is finished by removing the peeled and precipitated materials. This light shielding film has the excellent adhesion property to the substrate and has the good adhesion of the conductive film and the plating as well. Light leakage by the pinholes, etc., is not admitted. |
