发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To improve the reliability of solder bumps by reliably joining the solder bumps regardless of the height variation of the solder bumps. CONSTITUTION:After removing oxide films formed on the surfaces of bumps 13 formed on the electrode pads 12 of a semiconductor chip 11, the heights of the bumps 13 are measured. According to the height-measurement results of the bumps 13, the chip 11 is tentatively thermocompression bonded to a circuit board 17 at a prescribed interval, and then, the chip 11 is finally joined to the board 17 at the prescribed interval.</p>
申请公布号 JPH0758153(A) 申请公布日期 1995.03.03
申请号 JP19930201704 申请日期 1993.08.13
申请人 FUJITSU LTD 发明人 KARASAWA KAZUAKI;NAKANISHI TERU;HASHIMOTO KAORU;SAKAMURA TOSHIHIRO
分类号 H01L21/60;H01L21/66;H01L23/485;H05K3/34;(IPC1-7):H01L21/60 主分类号 H01L21/60
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