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发明名称
DEFECT INSPECTING APPARATUS FOR TRANSPARENT AND OPAQUE FILMS
摘要
申请公布号
JPH0755720(A)
申请公布日期
1995.03.03
申请号
JP19930207409
申请日期
1993.08.23
申请人
TOYOBO CO LTD
发明人
AKIMOTO KAZUMASA
分类号
G01B11/30;G01N21/89;G01N21/892;(IPC1-7):G01N21/89
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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