| 摘要 |
PURPOSE:To provide a high-accuracy vibrating gyro whose measuring error due to a temperature change is small. CONSTITUTION:The vibrating gyro contains a equilateral triangular prism-shaped vibrating body 12. A piezoelectric element 30, for driving, which vibrates the vibrating body 12 is formed on one side face of the vibrating body 12. Strain gages 14, 16, for output detection, which detect the strain applied to the vibrating body are formed on the two other side faces of the vibrating body 12. The vibrating body 12 is supported by the surface of a board 36 by a support member attached to a ridge part near its node point. A rectangular parallelepiped-shaped holding body 38 which is composed of the same material that of vibrating body 12 is formed on the surface of the board 36 as a vibrating body for temperature compensation. Strain gages 40, 42, for temperature compensation, which are used to detect the strain applied to the holding body 38 are formed on the surface of the holding body 38. For example, a Wheatstone bridge circuit is formed out of the strain gages 14, 16 for output detection, the strain gages 40, 42 for temperature compensation, a power supply and a detector. |
