| 摘要 |
PURPOSE:To alter thermal properties without causing the rise of the cost by providing a cylindrical heat insulating material formed from a plurality of ring-shaped heat insulating pieces stacked vertically, and forming circumferentially an accommodation part between upper and lower adjacent two ring-shaped heat insulating pieces for accomodating a heating resistor. CONSTITUTION:A heating resistor 30 is disposed around a vertical process tube 10, supported by a cylindrical heat insulating member 34. The cylindrical heat insulating member 34 comprises a plurality of ring-shaped heat insulating pieces stacked vertically, and an accommodation part for accommodating the heat resistor 30 is formed circumferentially between the upper and lower adjacent two ring-shaped heat insulating pieces. The accommodation part has an opening in a region opposite to the vertical process tube 10. The number of the ring-shaped insulating pieces stacked and the size thereof are altered and hereby a supporting region for the heating resistor 30 is altered whereby vertical thermal properties are altered. Hereby, in alteration of the temperature distribution lavor of replacing an apparatus itself is eliminated. |
