| 摘要 |
<p>PURPOSE:To provide a susceptor capable of keeping a semiconductor wafer in a good condition by preventing damage or any spotted traces on the back of the semiconductor wafer. CONSTITUTION:In a susceptor 1 including a counterbore part 2 for supporting a flat portion of a semiconductor wafer, at least three parts 3 for supporting time semiconductor wafer are provided along a predetermined circumference 5 in the counterbore part.</p> |
