| 摘要 |
<p>PURPOSE:To prevent slip of a semiconductor wafer from occurring by providing a susceptor comprising a susceptor body and a support member for a semiconductor wafer disposed removably on a counterbore part in the susceptor body, and limiting the deformation of the support member to a specific value or less. CONSTITUTION:A susceptor 10 is constructed with a susceptor body 3 including a counterbore part 4 for positioning and supporting a semiconductor wafer 2, and a support member 1 disposed removably on the counterbore part 4 and placing the semiconductor wafer 2 thereon. The deformation of the support member is limited to 50mum or less. Thereupon, even if any deformation or stress is produced on the counterbore part 4 owing to heating of the semiconductor wafer 2, flat portions of the support member 1 and the semiconductor wafer 2 are stably brought into contact with each other. Hereby, the flat portions of the semiconductor member and the semiconductor wafer are substantially brought into surface contact, whereby the semiconductor wafer is prevented from slipping.</p> |
