| 摘要 |
Formed on a side wall (2) of a processing liquid vessel placed on a movable table is a window portion, through which an arm member (31) extends and which permits the arm member (31) to move relative to the processing liquid vessel in a direction (X-direction) perpendicular to an axial direction of the arm member (31). The window portion is sealed by a sealing mechanism (S) which includes a seal plate (6) engaged with the arm member (31). On the other hand, a partition member (70) is provided inside of the processing liquid vessel so as to cover the sealing mechanism (S). When a closed space defined by the partition member (70) is filled with a clean processing liquid which is supplied from the outside through liquid feed pipes (74A, 74B), the clean processing liquid isolates the sealing mechanism from a dirty processing liquid in the processing liquid vessel. The processing liquid flows into the processing liquid vessel through a slight gap between a window portion (71) provided in that portion of the partition member (70), through which the lower arm member (31) extends, and a bellows (72) which closes the window portion (71).
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