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发明名称
Verfahren zur Herstellung eines Kristalls und Kristallkörpers.
摘要
申请公布号
DE69016073(D1)
申请公布日期
1995.03.02
申请号
DE1990616073
申请日期
1990.03.29
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
YONEHARA, TAKAO, ATSUGI-SHI, KANAGAWA-KEN, JP
分类号
C30B28/02;C30B25/18;H01L21/20;H01L21/324;H01L21/84;(IPC1-7):C30B25/18
主分类号
C30B28/02
代理机构
代理人
主权项
地址
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