| 摘要 |
PCT No. PCT/GB95/03018 Sec. 371 Date Oct. 3, 1997 Sec. 102(e) Date Oct. 3, 1997 PCT Filed Dec. 22, 1995 PCT Pub. No. WO96/21157 PCT Pub. Date Jul. 11, 1996There is disclosed an accelerometer comprising a substrate, a proof mass mounted to the substrate for movement in a first direction perpendicular to the plane of the substrate, the proof mass carrying a first sensing electrode, a second sensing electrode mounted relative to the substrate, wherein the first and second sensing electrodes comprise surfaces extending at an angle relative to the substrate and defining between them a sensing gap the width of which varies with movement of the proof mass in the first direction. |
