发明名称 |
Superconductor thin film and manufacturing method. |
摘要 |
Bi-Ti-O or Bi-W-O thin film of stable crystal phase is manufactured by forming a Bi-Ti-O of Bi-W-O thin film periodically in an environment including activated oxygen. A layered structure of Bi-Sr-Ca-Cu-O thin films and Bi-Ti-O or Bi-W-O thin films is manufactured by forming a Bi-Ti-O of Bi-W-O thin film periodically in an environment including activated oxygen. A stable superconductor thin film of high superconducting transition temperature is manufactured reproducibly by layering alternately a layered oxide superconductor thin film of Tl-Ba-Ca-Cu-O system and a Bi-W-O insulator thin film. <IMAGE> |
申请公布号 |
EP0640994(A2) |
申请公布日期 |
1995.03.01 |
申请号 |
EP19940116712 |
申请日期 |
1992.06.02 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
ICHIKAWA, YO;SETSUNE, KENTARO;ADACHI, HIDEAKI |
分类号 |
C23C14/00;C23C14/08;C30B23/02;H01L39/12;H01L39/24 |
主分类号 |
C23C14/00 |
代理机构 |
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代理人 |
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地址 |
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